In high-end fields such as chip semiconductors and optical imaging, the "body temperature" control of precision equipment directly determines core performance — for example, in OCD (Optical Coherence Tomography) equipment, a temperature fluctuation of 0.05℃ in the optical path system can cause a 30% drop in imaging resolution, and local overheating of the light source module can further shorten the lifespan of core components. Jice (Nanjing) with its self-developed precision temperature control technology provides corresponding solutions for precision equipment in the semiconductor industry.

1. Directly addressing industry pain points: Three core challenges of local temperature control in precision equipment

Difficulty in breaking through local temperature control accuracy: Core components such as semiconductor measurement probe and OCD equipment light source module require temperature fluctuations to be controlled within ±0.05℃, or even higher precision of ±0.005℃, which traditional temperature control solutions find hard to achieve;
 

Poor adaptability to complex scenarios: Some equipment requires both "global constant temperature + local temperature control" simultaneously, and traditional temperature control solutions struggle to achieve targeted regulation and precise coverage of local heat spots;
 

Conflict between airflow and cleanliness: To ensure temperature control efficiency, traditional air baths often use high-speed airflow, which easily causes particle suspension, violating ISO Class 3 or higher cleanliness requirements, especially affecting the yield rate of semiconductor wafer inspection, or causing turbulent airflow that interferes with sensitive components.

2. Core technology breakthroughs: More closely meeting users' high-precision scenario needs

1. Original high-precision multi-level temperature control technology, achieving an "independent temperature control brain" for both global and local control
 

· Global constant temperature: Maintains the overall equipment environment temperature stable at 22℃ (adjustable), with temperature stability up to ±0.002℃, meeting equipment constant temperature requirements;
 

· Local air bath temperature control ： Designed directional air curtains for local heat sources (such as OCD equipment light source module, laser interferometer probe), using "micro airflow jet + closed-loop PID feedback" technology to avoid thermal interference, achieving precise temperature control through coordinated matching of flow rate and temperature, with local temperature fluctuation control precision up to ±0.002℃;

2. Dual assurance of high cleanliness + anti-interference: Adapting to stringent requirements of precision scenarios
 

Precision equipment's requirements for "cleanliness" and "low vibration" are no less than temperature control accuracy. Jice (Nanjing) local air bath module is fully optimized, featuring dual functions of isolating external interference and preventing contamination:

· Cleanliness control: Internal cleanliness reaches ISO Class 1 (less than 10 particles / 0.1μm per cubic meter), meeting high-precision demand scenarios such as semiconductor wafer inspection;
 

· Anti-interference design: Uses low-noise fans (operating noise <45dB), implements vibration reduction measures; precisely controls airflow speed, combined with buffer chambers and air curtain barriers to ensure uniform airflow coverage of the temperature control area, avoiding interference with precision equipment components and operation.
 

3. Scenario-based implementation: Flexibly adapting to precision needs across multiple fields

The local air bath solution is not a "universal product" but a customized adaptation based on different equipment characteristics and requirements. It can be embedded in the narrow internal spaces of wafer inspection equipment, lithography machines, laser interferometer internal cavities, etc., quickly dissipating local heat spots.

3. Empowering domestic technology: The breakthrough in precision temperature control from "follower" to "leader"

As a representative enterprise in the domestic microenvironment control field, the value of Jice (Nanjing) local air bath solution lies not only in technological innovation but also in breaking the monopoly of foreign brands in the high-end precision temperature control field. It currently serves many leading chip semiconductor companies and research institutes.

With the continuous upgrading of precision manufacturing requirements today, Jice (Nanjing) local air bath solution, with its core advantages of "precision, cleanliness, adaptability" and independent innovation in domestic technology, provides key support for the upgrade of China's high-end manufacturing.