High-Precision Environmental Control Equipment

High-precision environmental control equipment is a self-developed precision environmental control product, which is mainly composed of equipment main cabinet, control system, air circulation system clean filter, refrigeration (heat) system, lighting system, local air bath, etc. It provides ultra-high precision temperature, humidity and cleanliness working environment for precision measurement and precision manufacturing equipment such as lithography machine and laser interferometer. The air flow is guided by the fan inside the device to circulate in a certain direction, and the control system processes each link of the circulating air flow, so that the temperature and humidity in the cabinet can achieve ultra-high control accuracy.

Product Highlights

Ultra high precision temperature and humidity control

Independent research and development of high precision temperature control technology, control output accuracy 0.1%

The key area of the internal temperature stability of the equipment can reach/-5mk (static), the internal temperature specification is 22.oc (adjustable), and the temperature level uniformity is less than 16mk/m

The internal humidity stability of the equipment can reach 0.5% @ 8h

The internal pressure stability of the equipment can reach/-3pa

Continuous stable working time is more than 144h

Ultra high level of cleanliness control

The system can achieve more than one hundred levels of cleanliness control.

Internal cleanliness: up to ISO Class 3 (equipment work area)

Real-time data record query

Data automatically generates curves for easy viewing

Data is automatically saved and can be exported in tabular form at any time

Synchronous records of events such as running status and fault status, with clear query objectives

Appearance custom detachable

Removable aluminum alloy frame, large equipment can be assembled on site

The box is made of high-quality sheet metal material, beautiful and generous, and the appearance color can be customized according to customer needs

Quiet and efficient equipment operation

More efficient, more powerful and quieter operation with EC fans

The interior of the refrigeration unit adopts high-efficiency sound insulation material, which improves the noise of the equipment to reduce the noise <45dB

Automatic safety protection system

Fault automatic protection program, all-weather worry-free operation

Fault real-time sound and light alarm reminder, remote assistance fault handling

 

Equipment Model Description

Naming

JICE

H

A

A

100

Code Point

1

2

3

4

5

Code 1

JICE-Brand

Code 2

H-high precision ring control series

Code 3

Refrigeration mode number A- air cooling type, refrigerant medium is water B- water cooling type, refrigerant medium is water C- air cooling type, refrigerant medium is Freon D-water cooling type, refrigerant medium is Freon E-user provided chilled water

Code 4

Temperature accuracy No. A- Accuracy greater than ± 0.01 B- Accuracy less than ± 0.01, greater than ± 0.05 C- Accuracy less than ± 0.05

Code 5

Equipment scale number 100-small equipment (general refrigerating capacity less than 5KW)200-medium equipment (general refrigerating capacity between 5KV-10KW) 300-large equipment (general refrigerating capacity above 10KW)


Operating Environment

The equipment shall be placed in a laboratory with certain temperature and humidity accuracy and cleanliness requirements for operation.

Ambient temperature and humidity conditions

± 2 ℃ DB temperature change rate within 0.5 ℃/8h

± 5% RH humidity change rate 59% within 8h

Ambient cleanliness conditions

ISO class6

Environmental noise

≤60dB

Power supply

Three-phase five-wire system 380VAC-50Hz or 220VAC-50Hz (depending on equipment)

Power supply voltage

Maximum allowable fluctuation range is ± 10%

Storage ambient temperature

Equipment refrigeration unit -40 ℃-70 ℃ touch screen -20 ℃-60 ℃, no condensation

Operating ambient temperature

Controller -20 ℃-60 ℃ Touch screen 0 ℃-50 ℃, no condensation

 

Typical Application

Chip Semiconductor

Precision Measurement

Precision Manufacturing

Research and Development

 

immediate consultation

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