The Guardian of Lithography Precision! How does ±0.002℃ precision temperature control equipment break through the bottleneck of semiconductor yield?
Release time:
2025-03-18
The precision environmental control cabinet achieves temperature control accuracy of up to ±0.002℃ and cleanliness control of class ten or higher, continuously leading the innovation of ultra-high precision environmental control technology.
In the semiconductor manufacturing field, the lithography machine is known as the "crown of the chip industry." However, even a temperature fluctuation of 0.01℃ can cause deformation in the photoresist exposure. This industry pain point isa company under Nanjing Tantu Technology,
Jice (Nanjing) Technology Co., Ltd.
the core direction conquered by its independently developed precision environmental control cabinet.
To date, the precision environmental control cabinet can achieve a temperature control accuracy of ±0.002℃and above class tencleanliness control, continuously leading the innovation of ultra-high precision environmental control technology. It also has the ability to customize non-standard solutions for all scenarios, meeting users' different environmental parameters and usage needs, such as temperature and humidity stability, cleanliness, anti-vibration, anti-magnetic, and sound insulation. Currently, we have the ability to customize non-standard solutions for all scenarios, meeting users' different environmental parameters and usage needs, such as temperature and humidity stability, cleanliness, anti-vibration, anti-magnetic, and sound insulation. We have served many leading global semiconductor, communication equipment, and display panel companies, and national key laboratories, and are used in numerous scientific research and production scenarios.
Jice precision environmental control cabinets are specially designed for lithography machines, laser interferometers, and other ultra-precision equipment, creating a "zero-interference" environment for semiconductor manufacturing. The equipment uses a closed-loop airflow circulation system. Driven by an EC fan, the airflow uniformly covers the inside of the equipment according to a precisely calculated path. Coupled with an independently developed high-precision PID temperature control module, it achieves a static temperature fluctuation of only ±2mK in key areas, greatly reducing the interference of temperature gradients on the optical system of the lithography machine. At the same time, humidity stability is controlled within ±0.5%, avoiding condensation or oxidation on the wafer surface due to humidity changes, ensuring the consistency of the exposure process from the source.
Cleanliness control is also a lifeline for semiconductor production. In the Jice precision environmental control cabinet, the cleanliness of the work area canexceed the ISO Class 3 standardeffectively preventing dust from adhering to the lithography machine lens or wafer surface. This performance has been verified in a leading wafer fab in China: After introducing the Jice environmental control cabinet, the line width yield of its 28nm process chips increased by 12%, and the annual rework cost was reduced by more than 8 million yuan.
More noteworthy is that the equipment supportslong-term stable operationperfectly adapting to the high-intensity production needs of semiconductor clean rooms. Through the real-time data monitoring system, engineers can view temperature and humidity curves, pressure fluctuations, and other parameters. The operating status, fault status, and other events are synchronously recorded, and the query is clear at a glance, providing data support for process optimization.
For semiconductor companies pursuing 5nm and even 3nm processes, the Jice precision environmental control cabinet is not only an environmental control device but also an "invisible shield" for advancing high-end chip manufacturing. Throughtemperature controlandclean environment managementdual technological breakthroughs, Jice is helping the global semiconductor industry break through the yield ceiling.
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