Providing Ultra-Precision Environmental Series Solutions
for Ultra-End Equipment
Industry Applications: Chip & Semiconductor, Precision Optics, Precision Measurement, New Energy, Aerospace, Communication Technology
Equipment Applications：Semiconductor Front-end Equipment (Lithography Machines, Etchers, etc.), Semiconductor Back-end Equipment (Bonders, etc.), Semiconductor Metrology & Testing Equipment, Optical Inspection Equipment (Laser Interferometers, etc.), Atomic Clocks, etc.
The output accuracy of ultra-end equipment depends on the comprehensive conditions such as environmental temperature and humidity stability, cleanliness, air pressure stability, vibration, and noise. For example, fluctuations in temperature and humidity will cause thermal expansion, contraction or deformation of the projection objective lens of lithography machines, affect the stability of the optical path, and lead to nanoscale positioning deviations and process parameter drifts. Insufficient cleanliness, on the other hand, will allow dust particles to enter the equipment's optical path, reaction chamber or wafer surface, resulting in contamination of optical components, pattern defects, short circuits and other malfunctions. Therefore, it is extremely critical to build a multi-parameter integrated and coordinated environmental system for ultra-end equipment such as lithography machines, interferometers, bonders, and semiconductor metrology and testing equipment.
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In semiconductor manufacturing processes, a large number of processes and equipment generate heat. For instance, dry etching equipment produces high temperatures due to high-frequency electric fields during operation, while lithography machines also emit substantial heat during exposure. To avoid deviations in process and equipment performance caused by local overheating or undercooling, Ultra-Precision Cooling Water Chillers achieve rapid heat dissipation and precise temperature control through constant-temperature circulating cooling water, removing the heat generated by equipment operation and process reactions.
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In industrial production, take the semiconductor industry as an example. Compressed air is widely used in processes such as wafer cleaning, photoresist stripping, and pneumatic component actuation. Strict temperature control is essential to prevent moisture or oil from separating out due to temperature fluctuations in compressed air, which could contaminate the wafer surface. As an inert shielding gas, nitrogen is applied in procedures including thin-film deposition (CVD/PVD), ion implantation, and wafer dicing. Constant temperature is the key to ensuring uniform film thickness and consistent doping concentration. Therefore, precise and stable temperature control of compressed air and nitrogen has become extremely critical.
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Polar Measurement (Nanjing) Technology Co., Ltd., as a mature manufacturer of high-precision environmental control equipment, we focus on innovation and development, and are committed to providing customized environmental control solutions for global enterprises, with strict temperature, humidity and cleanliness standards. Inject efficiency into your production environment.
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