Domestic precision environmental control technology achieves ISO Class 1 cleanroom environment, empowering semiconductor manufacturing
Release time:
2025-03-18
JiCe (Nanjing Technology Co., Ltd.) provides customized precision environmental solutions for fabs and measurement equipment suppliers of various scales, covering diverse scenarios of built-in micro-environmental control for equipment, helping the domestic semiconductor industry chain to overcome the "environmental bottleneck" problem.
In the semiconductor manufacturing field, lithography and metrology equipment have extremely stringent cleanliness requirements for the production environment. Taking lithography as an example, as the core process for chip pattern transfer, its tolerance for 0.1-micron particles in the air is almost zero. Semiconductor metrology equipment, as the "quality gatekeeper" of the manufacturing process, also relies on an ultra-clean environment to ensure nanometer-level detection accuracy.
According to the international standard ISO 14644-1, cleanroom environment levels are strictly classified by the number of suspended particles per unit volume:
ISO Class 1: ≤10 particles ≥0.1μm per cubic meter
ISO Class 3: ≤100 particles ≥0.1μm per cubic meter. These extremely clean requirements are key factors that restrict the yield and stability of high-end chips.
A company under Nanjing Tantu Technology,Jice (Nanjing) Technology Co., Ltd., relying on its independently developed
high-precision environmental control equipmenthas successfully overcome the technical barriers of ISO Class 1 cleanroom environments and can achieve the following in the equipment work area:
✅ Temperature fluctuation ≤ ±2mK (static conditions)
✅ Cleanliness consistently maintained at ISO Class 1 (locally better than ISO Class 1)
✅ Humidity deviation < ±0.5%@8h
✅ Continuous trouble-free operation
✅ Cleanliness consistently maintained at ISO Class 1 (locally better than ISO Class 1)
✅ Humidity deviation < ±0.5%@8h
✅ Continuous trouble-free operation
Currently, this technology has been applied to environmental control projects in lithography areas for many leading domestic semiconductor companies.
Jice (Nanjing) Technology Co., Ltd. can also provide
customized precision environmental solutions
for wafer fabs and metrology equipment suppliers of various scales, covering various scenarios of built-in micro-environmental control for equipment, helping the domestic semiconductor industry chain to overcome the "environmental bottleneck" problem.
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