Semiconductor industry temperature control expert: High-precision constant temperature and humidity chamber with accuracy up to ±0.002℃
Release time:
2025-04-09
Zeji Precision Temperature Control Equipment safeguards the high-precision production of semiconductor manufacturing.
In the semiconductor manufacturing field, precision is everything. Jiece (Nanjing) Technology Co., Ltd., a subsidiary of Nanjing Tantu Technology, provides
precision temperature control equipment
with its high-precision temperature control of ±0.002℃, making it an indispensable key equipment on semiconductor production lines.
Currently, we possess comprehensive non-standard customization capabilities, meeting users' diverse environmental parameters and usage needs, such as temperature and humidity stability, cleanliness, anti-vibration, anti-magnetic, sound insulation, and other personalized requirements. We have already served multiple leading global semiconductor, communication equipment, and display panel companies, as well as national key laboratories, and have been applied in numerous scientific research and production scenarios.
The precision environmental control cabinet is specially designed to meet the stringent environmental requirements of semiconductor manufacturing. Its independently developed high-precision temperature control technology ensures that the temperature stability in key areas inside the equipment can reach ±0.002℃ (static), and the control output accuracy reaches 0.1%, ensuring the extreme stability of the chip temperature during lithography, greatly reducing lithography deviations caused by temperature fluctuations and improving the yield rate of chip manufacturing.
Furthermore, the system can achieve cleanliness control above level ten, meeting the strict clean environment requirements of semiconductor production. The internal humidity stability of the equipment reaches ±0.5%@8h, and the pressure stability reaches +/-3Pa. It can operate continuously and stably, providing comprehensive and stable environmental protection for semiconductor manufacturing.
The real-time data recording and query function automatically generates and saves curves of temperature, humidity, and other data during the production process, which can be exported at any time, making it convenient for engineers to perform production analysis and quality traceability. The customizable and detachable design features a detachable aluminum alloy frame and high-quality sheet metal materials, meeting the on-site assembly requirements of large semiconductor equipment and allowing for customization of the appearance color according to customer preferences. The equipment operates quietly and efficiently, using EC fans and high-efficiency sound insulation materials, with noise < 45dB, creating a quiet and comfortable working environment for the production workshop. The automatic safety protection system provides automatic fault protection and real-time audio-visual alarm reminders, and can also provide remote assistance for fault handling, ensuring that semiconductor production operates worry-free around the clock. Choosing Jiece precision temperature control equipment provides comprehensive protection for the high-precision production of semiconductor manufacturing.
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