As a core enterprise of Nanjing Expansion Technology focusing on micro-environment control technology, Jice (Nanjing) Technology Co., Ltd. has created a super-precision instrument room. This room integrates independently developed high-precision micro-environment control system to create an ideal working environment with minimal temperature fluctuation and extremely high cleanliness (clean and constant temperature) for precision instruments such as lithography machines and vertical interferometers. This serves as a crucial infrastructure supporting high-precision measurement and scientific research production.
Nanometer-level temperature control, ultra-high precision temperature fluctuation
Jice uses its independently developed high-precision temperature control technology to achieve an output accuracy of 0.1%, allowing the key areas of internal environmental temperature stability to reach +/-2mK (static), with temperature uniformity less than 16mK/m. It achieves temperature control with different levels of precision such as ±0.002℃, ±0.005℃, ±0.05℃, ±0.01℃, and ±0.1℃. It creates a high-precision, constant temperature, and stable operating environment for precision instruments.
Highest ISO class 1 cleanliness, creating a dust-free space
The system can achieve cleanliness control above class 100, superior to ISO class 3 (equipment work area) at its highest, reaching ISO class 1. This prevents dust and other pollutants from affecting light transmission. Internal humidity stability can reach ±0.5%@8h, effectively preventing mold growth in optical components and rust in mechanical parts caused by humidity changes, thereby extending the lifespan of precision instruments.
Full-scenario non-standard customization, meeting diverse needs
It can meet users' various needs in terms of temperature and humidity stability, cleanliness, and other diversified personalized requirements such as anti-vibration, anti-magnetic, and sound insulation, ensuring normal user operation.
Intelligent maintenance, saving time and effort
It has a powerful real-time data recording and query function. Key data such as temperature and humidity during operation are automatically generated into curves for operators to intuitively understand environmental changes. Data is automatically saved and can be exported at any time. The running and fault states are recorded synchronously for convenient data analysis, quality traceability, and fault troubleshooting. In addition, the automatic safety protection system can achieve automatic fault protection to ensure all-weather stable operation of the equipment, reducing measurement interruptions caused by faults.
