Jice Precision Environmental Control System: Creating a Precise and Stable Environment for Semiconductor Measurement Equipment
Release time:
2025-08-21
In the field of semiconductor manufacturing, every nanometer change can directly affect the performance and yield of chips. As a key link in high-precision inspection, semiconductor measurement equipment (such as electron microscopes, film thickness meters, OCD measurement, etc.) itself has extremely stringent requirements for the operating environment. Even slight environmental fluctuations can introduce measurement errors.
Besides the overall environment, semiconductor measurement equipment is usually equipped with high-precision optical imaging devices (broadly referred to as "cameras"), where light sources, electronic control units, moving parts, and others may generate local heat sources, ultimately affecting the stability of the environment and the temperature stability of the wafer surface.
Jice (Nanjing) Technology Co., Ltd. deeply understands this demand and, relying on its profound technical accumulation in micro-environment control, designs specifically for high-end semiconductor measurement equipment Precision Environmental Control System , providing complete equipment support. The system consists of the main equipment cabinet (equipment maintenance structure module), clean filtration system, local air bath, control system, airflow circulation system, refrigeration (heating) system, etc. Through precise control of the overall environmental temperature and local air baths targeting local heat sources, combined with cleanliness control and vibration reduction treatment, it creates a precise, stable, constant-temperature, and clean operating environment for semiconductor inspection equipment.
Core Technical Advantages:
Achieve High "Temperature Accuracy" to Avoid Thermal-Induced Errors
Temperature is the primary factor affecting measurement accuracy. The Jice precision environmental control cabinet uses a self-developed high-precision cooling/heating control system to achieve high temperature accuracy and stability. It can control internal environmental temperature fluctuations within an extremely small range (±2mK), ensuring the repeatability and reliability of every measurement data.
Ultra-Clean Space to Avoid Particle Contamination
Besides temperature control accuracy, cleanliness is equally crucial. Suspended particles settling on wafers or optical lenses of equipment can cause defects or signal interference. The interior of the Jice environmental control cabinet can maintain an ultra-high cleanliness environment up to ISO Class 1, effectively isolating dust, particulates, and other contaminants, providing a clean environment for semiconductor measurement equipment and protecting expensive optical components and sensitive samples.
Besides temperature control accuracy, cleanliness is equally crucial. Suspended particles settling on wafers or optical lenses of equipment can cause defects or signal interference. The interior of the Jice environmental control cabinet can maintain an ultra-high cleanliness environment up to ISO Class 1, effectively isolating dust, particulates, and other contaminants, providing a clean environment for semiconductor measurement equipment and protecting expensive optical components and sensitive samples.
Intelligent Integration, One-Stop Environmental Support
Our solution integrates precision temperature control, cleanliness control, humidity control (up to ±0.3% RH), and anti-micro-vibration functions into a comprehensive environmental support system. It supports non-standard customization according to your equipment's specific model and process requirements, matching the precision needs of different semiconductor measurement equipment. The intelligent equipment management system provides 7x24-hour real-time data monitoring and recording, making all environmental parameters clear at a glance. Data is traceable, providing a solid basis for quality analysis and troubleshooting.
Our solution integrates precision temperature control, cleanliness control, humidity control (up to ±0.3% RH), and anti-micro-vibration functions into a comprehensive environmental support system. It supports non-standard customization according to your equipment's specific model and process requirements, matching the precision needs of different semiconductor measurement equipment. The intelligent equipment management system provides 7x24-hour real-time data monitoring and recording, making all environmental parameters clear at a glance. Data is traceable, providing a solid basis for quality analysis and troubleshooting.
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