Jice (Nanjing): A Practical Case Study on Customized Ultra-Precision Environmental Control in the Semiconductor Industry
Release time:
2025-12-10
Jice (Nanjing) has precisely implemented this customized solution, providing the ultra-precise environment required for customers’ semiconductor manufacturing processes and offering reliable environmental support for high-yield and highly consistent production of semiconductor devices.
Jice (Nanjing) Technology Co., Ltd. has customized ultra-precise environmental control solutions for semiconductor clients. In the core manufacturing processes of semiconductors, indicators such as ambient temperature and humidity, cleanliness levels, and parameter stability directly affect the consistency and yield of device fabrication; therefore, it is essential to provide ultra-precise environmental control solutions tailored to their specific production needs.
Taking a certain semiconductor manufacturing process’s ultra-precision environmental control solution as an example, the following is a description of the surrounding environmental conditions and the implementation status of parameters for the ultra-precision environmental control area within it.
Implementation of the plan: Aligning internal and external environments to achieve precise environmental control of key microenvironments.
In response to process requirements, the solution implements a highly precise control scheme for the core areas based on the underlying environmental conditions of the region, thereby achieving accurate control of both internal and external environmental parameters.
External environment area: Front-end stable support
As the outer-layer safeguard for the ultra-precise environment, the user's external area has relatively stringent environmental parameter specifications:
Temperature and humidity conditions: 22 ± 2℃ DB (temperature change rate within 2℃/h), 50 ± 5% RH (humidity change rate within 5%/h);
Associated parameters: ISO Class 5 cleanliness, ambient noise level of 60 dB; altitude range: -20 to 2000 m; nominal air pressure: 78–101.4 kPa; pressure gradient ≤ 2.0 kPa/hr and ≤ 10 Pa/10 sec.
Ultra-precision environmental control zone: Meeting the extreme requirements of the manufacturing process
Based on the external environment, achieve ultra-precise parameter control for the core production area (equipment operating zone):
Cleanliness: The equipment's work area meets ISO Class 3 standards;
Temperature: The core temperature is stabilized at 22.0℃, with a temperature stability of ±5 mK in the critical region (static) and ±20 mK in other regions (static). The temperature uniformity across regions is less than 16 mK/m.
Humidity: Relying on the approach of "stable moisture content in the external environment + precise temperature control," we achieve internal humidity stability within ±0.8% RH.
Pressure and Noise: Regional pressure stability ±3 Pa, internal noise ≤45 dB.
Jice (Nanjing) has precisely implemented this customized solution, providing the ultra-precise environment required for customers’ semiconductor manufacturing processes. All parameters closely match their stringent microenvironment standards for production, offering reliable environmental support for high yield and high consistency in semiconductor device manufacturing.
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