Stability is Paramount: The Precision Environmental Control System Supporting the Extreme Ultraviolet Lithography Machine Safeguards Core Equipment Performance
Release time:
2026-01-13
The Jice Precision Environmental Control System has provided core support for the high-precision, high-efficiency production of chip manufacturing at numerous enterprises.
As the core critical equipment for chip manufacturing, the lithography machine’s operational environment stability directly affects the precision and product quality of chip fabrication. Among these factors, precise temperature control technology is a key component in the lithography machine’s supporting system and serves as an essential prerequisite for ensuring the stable and efficient operation of the lithography machine.
Jice (Nanjing) Technology Co., Ltd.
Relying on strong R&D capabilities, we have launched precision environmental control equipment specially designed to support lithography machines. With an ultra-high-precision temperature control capability of ±0.002℃ and ISO Class 1 cleanliness standards, this equipment has become a premium environmental protection solution tailored for lithography machines. The equipment offers full-service, non-standard customization across all scenarios, comprehensively meeting users’ diverse needs in areas such as temperature and humidity stability, cleanliness, resistance to micro-vibrations, anti-magnetic interference, and sound insulation. Our clients include numerous global leaders in the semiconductor, telecommunications equipment, and display panel industries, as well as key national laboratories. This equipment is widely used in various core applications spanning both research and production.
The operation of a lithography machine is based on high-precision optical projection technology. By precisely projecting circuit patterns onto the surface of silicon wafers, it completes the core manufacturing process of chips. During this highly precise operation, even minor temperature fluctuations can easily cause thermal expansion and contraction in the optical system, leading to shifts in lithographic accuracy, resulting in deviations in chip circuitry and ultimately reducing the yield of good-quality chips. Therefore, establishing a stable working environment for the lithography machine is of paramount importance in the chip manufacturing process.
High-precision temperature-control equipment from Jice plays a critical role in ensuring the stable operation of lithography machines. Equipped with a high-precision temperature-control system, it can achieve an ultra-high temperature control accuracy of ±0.002℃, effectively minimizing the impact of ambient air temperature fluctuations on the lithography machine. This provides a constant temperature environment for the lithography machine’s optical system, significantly enhancing the stability and accuracy of the lithography process and achieving a control output accuracy of 0.1%.
In addition to precise temperature control, this equipment also excels in humidity control and cleanliness assurance. The equipment maintains internal humidity stability within ±0.1% RH, effectively preventing failures such as corrosion of lithography machine components and fogging of optical lenses caused by humidity fluctuations. In terms of cleanliness control, the system can achieve up to ISO Class 1 cleanliness standards, efficiently trapping even the tiniest dust particles and preventing them from interfering with the lithography process, thereby ensuring the lithography machine operates continuously and reliably in an ultra-clean environment.
Comprehensive data recording and intelligent protection features provide strong support for enterprise production management. Jice’s precision temperature-control equipment is equipped with real-time data recording and query functions, offering thorough and detailed data support for production management and quality traceability, thereby ensuring the equipment’s safe operation around the clock.
In terms of equipment design, Jice has carefully taken into account the actual layout requirements of semiconductor workshops. It adopts a detachable aluminum alloy frame structure, allowing large-scale equipment to be quickly assembled on-site, thereby effectively reducing installation time and costs. The cabinet body is made from high-quality sheet metal, offering both robust durability and flexible customization options. Customers can customize the exterior color according to their specific needs, ensuring a perfect match with the overall workshop environment.
Thanks to its outstanding performance, Jice Precision Environmental Control Systems have provided core support for the high-precision and high-efficiency production of semiconductor chips by numerous enterprises.
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