In the high-precision inspection stage of semiconductor manufacturing, even nanometer-scale deviations can directly impact chip performance and yield. Semiconductor inspection equipment—such as electron microscopes, film-thickness gauges, and optical critical-dimension (OCD) metrology systems—serves as the core inspection tool and imposes extremely stringent requirements on its operating environment: any minor environmental fluctuation can introduce measurement errors. Moreover, such equipment typically incorporates high-precision optical imaging components (broadly classified as “cameras”), whose internal light sources, electronic control units, and moving parts tend to generate localized heat during operation, thereby compromising environmental stability and disrupting the uniformity of wafer-surface temperature.

Jice (Nanjing) Technology Co., Ltd. With deep expertise in microenvironment control, we leverage our extensive technical foundation to precisely align with the upgrade requirements of semiconductor testing equipment. We have specifically developed a high-precision environmental control system and provide comprehensive equipment integration services. The system comprises key components such as the main cabinet (maintenance structure module), clean-air filtration system, localized air-bath unit, control system, air-flow circulation system, and refrigeration (heating) system. By precisely regulating overall environmental temperature stability and implementing targeted air-bath control over localized heat sources, while simultaneously conducting cleanliness management and vibration isolation, we deliver a precise, stable, constant-temperature, and clean operating environment that supports the upgrade of semiconductor testing equipment.

Core Technological Advantages:

1. High-precision temperature control to eliminate thermal-induced errors: Temperature is the primary factor limiting measurement accuracy. The Jice precision environmental control cabinet is equipped with a self-developed, high-precision cooling/heating control system that maintains internal temperature fluctuations within an ultra-narrow range of ±0.002°C, thereby ensuring the accuracy and reliability of measurement data from the very source.

2. Creation of an ultra-clean environment to prevent particulate contamination: Cleanliness is a critical guarantee for semiconductor inspection environments. Suspended particles that deposit on wafer surfaces or optical lenses of equipment can easily lead to inspection defects or signal interference. The Jice environmental control cabinet can stably maintain an ultra-high cleanliness level of up to ISO Class 1, effectively isolating dust, particulates, and other contaminants. This provides clean operating conditions for semiconductor inspection equipment, extends the service life of optical components, and protects sensitive samples.

3. Intelligent Integrated Solutions with Customized Service Support: This solution integrates multiple functions, including precision temperature control, cleanroom management, humidity regulation, micro-vibration isolation, and magnetic shielding, to form an integrated environmental support system. It supports non-standard customization based on customers’ equipment models and process requirements, ensuring precise adaptation to the upgrade needs of various semiconductor testing devices. The intelligent management system enables 24/7 real-time data monitoring and recording, providing clear visibility into environmental parameters and full traceability of all data, thereby delivering robust data support for quality analysis and fault diagnosis.

UAC300 High-Precision Environmental Control System

UBA300 High-Precision Environmental Control System

UAA300 High-Precision Environmental Control System

UCB100 High-Precision Environmental Control System

UCC100 High-Precision Environmental Control System

UCC100 High-Precision Environmental Control System

UBA200 High-Precision Silent Environmental Control System