Extreme Measurement: Achieves Class 1 cleanroom conditions with ±0.002°C temperature stability, providing tailored environmental control for precision equipment.
Release time:
2026-04-23
The Jice High-Precision Environmental Control System UPECS enables precise control from the “room level” to the “equipment level.”
I. The Neglected Issue of Precision
In the aerospace component testing laboratory, a precision testing instrument is in operation. The environment is classified as Class 1 clean, with a temperature of 22°C and a relative humidity of 55%—parameters that appear to meet industry standards. However, if the temperature fluctuates by more than ±0.1°C, differences in the thermal expansion coefficients of precision parts can cause drift in the measurement reference; and if the humidity deviates by more than ±2% RH, static charge buildup may break down the surface coatings of sensitive components.
This is not an isolated case—in fields such as semiconductor lithography, precision optical metrology, and blade inspection for aero-engines, “The macro environment meets the standards, but the micro environment is out of control.” The hidden costs are quietly affecting the precision and stability of high-end manufacturing.
II. From “Room-Level” to “Equipment-Level”: A Shift in HVAC Philosophy
Traditional cleanroom environmental control, much like central air conditioning, aims to achieve compliance with set standards across the entire space on an average basis. However, the core operating area of precision equipment is often only a few cubic meters, yet it must meet nanometer-level process accuracy requirements. UPECS, the high-precision environmental control system developed by Jice (Nanjing) Technology Co., Ltd., was specifically designed to resolve this very contradiction.
“UPECS is not a scaled-down version of conventional cleanroom air-conditioning systems; rather, it is a purpose-built environmental control solution tailored for precision equipment,” explained the head of Jice Technology. This system delivers environmental-control accuracy that far exceeds cleanroom standards, integrating the precise regulation of critical parameters such as temperature and humidity directly into the equipment’s structural framework—effectively shifting precision from the “room level” to the “equipment level.”
Core Performance Metrics:
Temperature stability: up to ±0.002°C (±2 mK)
Humidity stability: up to ±0.1% RH, minimizing refractive-index fluctuations in the optical path and reducing electrostatic risks.
Cleanliness Class: Achieves up to ISO Class 1, significantly exceeding the cleanliness requirements of conventional cleanrooms.
Noise Control: ≤45 dB, meeting the low-interference requirements of precision measurement applications.
III. Scenario-Based Customization: The Environmental Control System Becomes an Integral Component of the Equipment
Unlike standardized environmental equipment, Jice UPECS adopts a modular architecture and provides solutions tailored to diverse applications such as semiconductors, aerospace, and precision optics. Non-standard customization Ability:
Semiconductor metrology equipment suite
OCD optical critical-dimension metrology equipment is highly sensitive to both micro-vibrations and thermal drift. The UPECS from Extreme Measurement achieves nanometer-level measurement repeatability by implementing precise environmental control across the entire system, employing localized air-bath (ABM) point-to-point temperature control for heat-generating components such as electronic control units and moving parts, and integrating anti-microvibration design features.
In a specific semiconductor testing equipment project, UPECS employs closed-loop airflow circulation and a high-precision PID control algorithm to maintain temperature fluctuations in the working chamber at the millikelvin level. Combined with CFD-based airflow simulation and optimization to eliminate vortex dead zones, this approach significantly enhances the repeatability and reliability of measurement data.
Aerospace Precision Inspection
To meet the precision measurement requirements for critical components such as aeroengine blades and aerospace valves, UPECS implements coordinated control of temperature, humidity, and cleanliness, effectively addressing the challenge of batch-to-batch consistency caused by environmental temperature fluctuations.
Lithography Equipment Frame Assembly
Lithography optical systems are extremely sensitive to temperature fluctuations; even a 0.1°C deviation can lead to pattern distortion. UPECS’s milli-Kelvin-level temperature control, combined with CFD-optimized airflow management, ensures the overlay accuracy required for multi-pattern exposure (MPC). The system’s integrated clean-air filtration system achieves ISO Class 1 cleanliness, and with humidity stability maintained at ±0.1% RH, it effectively prevents photoresist surface defects caused by dust adhesion and lens fogging.
IV. Technological Strength: Milli-Kelvin-Level Technological Innovation Ensures Each Device Has Its Own Unique “Microenvironment”
Jice (Nanjing) Technology Co., Ltd., leveraging its parent company’s integrated R&D-and-manufacturing model, achieves 100% in-house control over critical processes and can flexibly meet multi-dimensional customization requirements, including stability across varying temperature and humidity levels, cleanliness standards, air-pressure stability, micro-vibration resistance, magnetic shielding, and noise reduction.
The company has served numerous global leaders in the chip and semiconductor, telecommunications equipment, and optoelectronics industries, as well as key national laboratories. Its product portfolio includes the UPECS high-precision environmental control system, the Chiller high-precision chilled water unit, and the ACU high-precision gas temperature control unit, among others.
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