Compatibility of the Jice High-Precision Environmental Control System UPECS with Semiconductor Metrology Equipment
Release time:
2026-04-27
The high-precision environmental control system UPECS is specifically designed for semiconductor metrology equipment, delivering milli-Kelvin temperature control and ISO Class 1 cleanliness to ensure measurement accuracy and stability.
I. Industry Pain Points: What Kind of Environmental Support Is Required for Nanometer-Level Precision?
Semiconductor metrology equipment represents the final critical checkpoint in chip yield control; however, the environmental requirements for such equipment are far more stringent than one might expect. Take optical critical dimension measurement (OCD) as an example: its optical path system is extremely sensitive to temperature, and localized overheating of the light-source module can significantly shorten the service life of key components. Conventional thermal-control solutions often employ high-velocity airflow to enhance heat-exchange efficiency, but this approach readily induces particle suspension, directly conflicting with the stringent cleanliness requirements of advanced manufacturing environments. Even more challenging is the fact that metrology equipment houses both precision optical components that demand uniform, system-wide thermal stability and localized heat sources—such as electronic control units and moving parts—that require point-to-point cooling. Traditional solutions frequently struggle to balance these competing demands, resulting in suboptimal performance across the board. It is difficult to simultaneously meet the dual requirements of “global constant temperature” and “local precision.” 。
II. Jice High-Precision Environmental Control System UPECS: A Dedicated Microenvironment Control Unit for Metrology Equipment
Jice (Nanjing) Technology Co., Ltd.
The newly launched high-precision environmental control system, UPECS, is not a scaled-down version of conventional cleanroom air-conditioning systems; rather, it is a dedicated micro-environment control unit designed specifically for semiconductor metrology equipment. It provides precise regulation of environmental parameters within the small spatial footprint of the metrology equipment, ensuring a stable and reliable external environment for critical components such as optical paths and probes.
UPECS’s core technical specifications are directly aligned with the stringent requirements of metrological equipment: temperature stability of ±0.002°C, humidity stability of ±0.1% RH, cleanliness levels up to ISO Class 1, and operating noise kept below 45 dB. These parameters ensure precise control of the microenvironment for metrological instruments, thereby directly guaranteeing the reliability of measurement results.
III. Core Capabilities for Adapting to Semiconductor Metrology Equipment
Millikelvin-level temperature control to mitigate thermal drift. UPECS employs a proprietary high-precision algorithm and multi-stage temperature-control technology to maintain the temperature fluctuations in the microenvironment surrounding the measurement equipment within an extremely narrow range through closed-loop airflow circulation. For hotspots on the measurement equipment, the system is equipped with localized gas-bath modules to achieve point-to-point, precise temperature control. In OCD measurement systems, UPECS ensures highly stable temperatures in the area surrounding the optical probe, thereby preventing thermal accumulation that could degrade imaging resolution.
High cleanliness ensures measurement accuracy. The system employs a vertical unidirectional airflow design optimized through computational fluid dynamics simulation, coupled with a cover filtration system, to achieve ISO Class 1 cleanliness. For equipment such as electron microscopes and film-thickness measurement instruments, UPECS ensures precise temperature control while maintaining a high-grade clean environment, thereby preventing particle deposition that could lead to errors in wafer surface inspection.
Modular architecture with flexible configuration. UPECS comprises a main cabinet, a control system, an air circulation system, a clean-air filtration system, a refrigeration system, and localized air-bath modules, among other components; each functional module can be selectively configured as needed. This design not only ensures 24-hour temperature stability in designated zones but also integrates seamlessly with the equipment’s industrial design, enabling rapid on-site deployment.
Multi-parameter synergy ensures measurement accuracy. In addition to temperature, humidity, and cleanliness control, UPECS seamlessly integrates anti-microvibration design and magnetic shielding, providing a low-interference operating environment for vibration-sensitive metrology instruments such as laser interferometers and atomic force microscopes.
IV. Conclusion
Under the overarching trend of domesticating semiconductor equipment, breakthroughs in metrology equipment accuracy depend not only on advances in optics, mechanics, and algorithms, but also on the concurrent enhancement of fundamental capabilities in microenvironment control. Jice’s ultra-precise environmental control system, UPECS, delivers millikelvin-level temperature control, ISO Class 1 cleanliness, and modular customization, thereby providing the environmental assurance necessary to elevate semiconductor metrology equipment from “functional” to “user-friendly.”
While the industry is focused on core process equipment such as lithography tools and etchers, the ultra-precision environmental control system UPECS developed by Jice stands out as a critical enabler for the stable operation of China’s entire semiconductor equipment value chain—delivering milli-kelvin-level precision control that embodies the “systemic symbiosis” underlying chip manufacturing.
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