As chip manufacturing processes steadily advance from 28 nm to 7 nm, 5 nm, and even 3 nm and beyond, transistor dimensions continue to shrink, leading to an exponential increase in the sensitivity of key process metrics—such as lithography overlay accuracy, thin-film deposition uniformity, and etch selectivity—to variations in the production environment. Semiconductor equipment manufacturers, when delivering core process tools like lithography systems, bonding equipment, and metrology instruments, impose stringent and well-defined technical specifications for supporting environmental conditions, including cleanliness, temperature and humidity stability, and micro-vibration control. These specifications have become critical prerequisites for smooth equipment acceptance and stable process validation, directly impacting chip yield and production efficiency.

JiCe High-Precision Environmental Control System UPECS , deeply engaged in the supporting infrastructure for advanced semiconductor manufacturing processes, with a focused commitment to delivering customized environmental control solutions for core semiconductor process equipment. The company consistently keeps pace with the iterative advancements in cutting-edge process technologies and continuously upgrades its technical capabilities. In the realm of cleanroom environment construction, the high-precision environmental control system UPECS demonstrates clear core advantages, capable of supporting up to ISO Class 1 Cleanroom solution design and implementation, perfectly tailored to core process steps with extremely stringent cleanliness requirements, such as lithography, bonding, and metrology; in addressing the critical pain point of temperature and humidity control, UPECS demonstrates industry-leading high-precision capabilities, enabling stable achievement of ±0.002℃ the temperature control accuracy and ±0.1%RH The precision of humidity control.

To address the differentiated environmental requirements of various process zones on semiconductor production lines, UPECS by Jice offers highly flexible, customized environmental control solutions that break away from one-size-fits-all system integration and precisely meet the unique, tailored needs of each core process area. UPECS also excels in service responsiveness and full lifecycle support: it enables efficient delivery and commissioning of environmental control systems through turnkey services, while providing 24/7 real-time monitoring of environmental parameters and proactive anomaly alerts to comprehensively ensure continuous, stable process operation. For semiconductor manufacturers, when selecting an environmental control system provider, the three key considerations are “long-term, stable compliance with specifications, rapid response to process iterations, and full-lifecycle yield assurance.”

Jice UPECS is underpinned by industry-leading, high-precision environmental control technology and driven by a deep understanding of advanced semiconductor manufacturing processes. Leveraging precise environmental control capabilities, flexible solution customization, and efficient service responsiveness, Jice UPECS provides semiconductor manufacturers striving for breakthroughs in advanced processes with stable, accurate, sustainable, and cost-effective full-lifecycle environmental control solutions, thereby supporting the continuous advancement of China’s semiconductor industry in cutting-edge process technologies.

UAC300 High-Precision Environmental Control System

UBA300 High-Precision Environmental Control System

UAA300 High-Precision Environmental Control System

UCB100 High-Precision Environmental Control System

UCC100 High-Precision Environmental Control System

UCC100 High-Precision Environmental Control System

UBA200 High-Precision Silent Environmental Control System