Lithography is the most “delicate” step in chip manufacturing: even a temperature variation of just a few tenths of a degree can cause photoresist dimensions to drift, lens focus to degrade, and uneven thermal expansion of the wafer to misalign patterns across layers—ultimately impacting yield. Industry standards typically demand temperature stability within ±0.1°C in lithography areas, with advanced nodes requiring precision down to the ±0.01°C level.

Conventional cleanrooms address the issue of the “room” itself. In lithography, however, the real sensitivity lies not in the room but in the equipment’s microenvironment—the core work area of the tool—where yield is ultimately determined.

High-Precision Environmental Control System of Jice (Nanjing) Technology Co., Ltd. , that’s exactly what we do: we create highly precise microenvironments for equipment, enabling the establishment of uniformly stable, temperature‑controlled, clean spaces throughout the entire equipment area, or seamless integration with the equipment itself. The air temperature stability in the core zone is achieved to ±0.002℃ …compressing thermal disturbances below the equipment’s specified threshold. Once temperature—the primary variable—is stabilized, photoresist dimensions no longer drift, the lens no longer loses focus, and measurement results begin to converge—yield becomes more consistent.

The costs of humidity fluctuations are equally insidious: too low, electrostatic discharge can damage sensitive components; too high, condensation on optical surfaces can cause irreversible harm; and repeated cycling subjects hygroscopic materials to continuous expansion–contraction fatigue. The system can achieve humidity stability as tight as ±0.1% RH , compressing electrostatic risks, condensation thresholds, and material‑state fluctuations within a sufficiently narrow window.

The pain point of cleanliness lies not in the overall environment, but in localized areas. The system can establish a clean barrier as high as ISO Class 1 at the equipment’s working surface, minimizing the likelihood of particulate contamination and surface defects—resulting in a significant reduction in scrap rates, which translates not only into cost savings but also into fewer quality disputes and substantially fewer unplanned line stoppages due to misjudgments.

The high-precision environmental control system is built around domestically developed subsystems, delivering performance on par with world‑class standards while freeing customers from the constraints of relying on a single import channel—where lead times are unpredictable and after‑sales response is slow. Covering everything from temperature and humidity to cleanliness, Jice translates every stringent environmental requirement of the lithography process into verifiable, acceptance‑ready specifications.