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UAC300 Ultra-Precision Environmental Control System
UBA300 Ultra-Precision Environmental Control System
UAA300 Ultra-Precision Environmental Control System
UCB100 Ultra-Precision Environmental Control System
UCC100 Ultra-Precision Environmental Control System
UBA200 Ultra-Precision Environmental Control System
Normal-Temperature Compression Refrigeration Chiller
Heat Exchange Type Chiller
High-Precision Gas Temperature Controller ACU
Is the interferometer’s output accuracy insufficient? The UPECS ultra-precision environmental control system from Jice restores environmental accuracy.
Compatibility of the Jice High-Precision Environmental Control System UPECS with Semiconductor Metrology Equipment
Extreme Measurement: Achieves Class 1 cleanroom conditions with ±0.002°C temperature stability, providing tailored environmental control for precision equipment.
Beyond Lithography Tools: Extreme Measurement and High-Precision Environmental Control Support the Stable Operation of China’s Semiconductor Equipment
Jice High-Precision Chiller Achieves Millikelvin-Level Temperature Control, Pushing the Boundaries of Domestic Temperature-Control Technology
From the Cleanroom to the Heart of the Equipment: Jice UPECS Creates a “Microenvironment” for Semiconductor Equipment