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JiCe UPECS: A High-Precision Microenvironment Solution Tailored for Optical Platforms
The Jice UPECS environmental control system achieves ±0.002°C temperature control, ±0.1% RH humidity control, and ISO Class 1 cleanliness through independent micro-environments, thereby ensuring the stability of optical platforms and advancing the development of optical technologies.
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2026
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JiCe UPECS: High-Precision Environmental Control Solutions for Advanced Manufacturing Processes
Jice UPECS specializes in environmental control for advanced semiconductor manufacturing processes, delivering high-precision, flexibly customized solutions to ensure process stability and yield.
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Is the interferometer’s output accuracy insufficient? The UPECS ultra-precision environmental control system from Jice restores environmental accuracy.
The Jice High-Precision Environmental Control System (UPECS) enhances interferometer accuracy by customizing the microenvironment, addresses temperature-control challenges, and improves measurement reliability and delivery quality.
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04
Compatibility of the Jice High-Precision Environmental Control System UPECS with Semiconductor Metrology Equipment
The high-precision environmental control system UPECS is specifically designed for semiconductor metrology equipment, delivering milli-Kelvin temperature control and ISO Class 1 cleanliness to ensure measurement accuracy and stability.
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Extreme Measurement: Achieves Class 1 cleanroom conditions with ±0.002°C temperature stability, providing tailored environmental control for precision equipment.
The Jice High-Precision Environmental Control System UPECS enables precise control from the “room level” to the “equipment level.”
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